Image data fusion of SIMS and TOF-SIMS with a high spatial resolution is helpful to obtain a clearer score image by PCA. An image data fusion of SIMS and TOF-SMS in high spatial and mass resolution ...
A focused ion beam scanning electron microscope (FIB-SEM) equipped with a compact time-of-flight secondary ion mass spectrometer (ToF-SIMS) 1,2 and traditional energy dispersive X-ray spectroscopy ...
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